Reduced-order modelling of the Reynolds equation for flexible structures
نویسندگان
چکیده
The accurate modelling of damping is essential to capture the dynamic behaviour of a MEMS device. Our interest lies in squeeze-film damping which models the behaviour of a fluid in small gaps between a fixed surface and a structure moving perpendicular to this surface (Fig.1). The lateral dimensions of the surfaces are large compared to the gap and the system is considered isothermal. Squeeze film damping is then governed by the Reynolds equation [1]:
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